Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867813 | Substrate processing apparatus, substrate processing method and recording medium | Yuzo Ohishi | 2020-12-15 |
| 10867817 | Substrate processing apparatus, substrate processing method, and storage medium | Yuichi Yoshida, Yuzo Ohishi | 2020-12-15 |
| 10615062 | Substrate processing apparatus, substrate processing method, and storage medium | Yuichi Yoshida, Yuzo Ohishi | 2020-04-07 |