Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10713772 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Yoshifumi Amano, Yuki Ito, Eiichiro Okamoto, Ryoji Ikebe | 2020-07-14 |