Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679845 | Substrate processing apparatus having cooling member | Hiroaki Inadomi, Satoshi Okamura | 2020-06-09 |
| 10619922 | Substrate processing apparatus, substrate processing method, and storage medium | Gentaro Goshi, Hiromi Kiyose | 2020-04-14 |
| 10593571 | Substrate processing apparatus | Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Okamura +4 more | 2020-03-17 |