Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira +6 more | 2020-12-15 |
| 10679845 | Substrate processing apparatus having cooling member | Satoshi Okamura, Satoshi Biwa | 2020-06-09 |
| 10593571 | Substrate processing apparatus | Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Okamura, Satoshi Biwa +4 more | 2020-03-17 |