Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879107 | Method of forming barrier free contact for metal interconnects | Ekmini Anuja De Silva, Jennifer Church, Luciana Meli Thompson | 2020-12-29 |
| 10833258 | MRAM device formation with in-situ encapsulation | Chih-Chao Yang, Daniel C. Edelstein, Karthik Yogendra, John C. Arnold | 2020-11-10 |
| 10833257 | Formation of embedded magnetic random-access memory devices with multi-level bottom electrode via contacts | John C. Arnold, Chih-Chao Yang, Theodorus E. Standaert | 2020-11-10 |
| 10796911 | Hardmask stress, grain, and structure engineering for advanced memory applications | Michael Rizzolo, Oscar van der Straten, Chih-Chao Yang | 2020-10-06 |
| 10707413 | Formation of embedded magnetic random-access memory devices | Chih-Chao Yang, John C. Arnold, Michael Rizzolo, Jon Slaughter | 2020-07-07 |
| 10685879 | Lithographic alignment of a conductive line to a via | John C. Arnold, Dominik Metzler, Takeshi Nogami | 2020-06-16 |
| 10672618 | Systems and methods for patterning features in tantalum nitride (TaN) layer | Vinh Luong, Isabel Cristina Chu | 2020-06-02 |
| 10672611 | Hardmask stress, grain, and structure engineering for advanced memory applications | Michael Rizzolo, Oscar van der Straten, Chih-Chao Yang | 2020-06-02 |
| 10656527 | Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer | Ekmini Anuja De Silva, Indira Seshadri, Jing Guo, Nelson Felix | 2020-05-19 |
| 10615037 | Tone reversal during EUV pattern transfer using surface active layer assisted selective deposition | Ekmini Anuja De Silva, Luciana Meli Thompson | 2020-04-07 |
| 10539884 | Post-lithography defect inspection using an e-beam inspection tool | Luciana Meli Thompson, Ekmini Anuja De Silva | 2020-01-21 |