Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879190 | Patterning integration scheme with trench alignment marks | Chih-Chao Yang, Hao Tang, Cornelius Brown Peethala | 2020-12-29 |
| 10685879 | Lithographic alignment of a conductive line to a via | John C. Arnold, Ashim Dutta, Takeshi Nogami | 2020-06-16 |
| 10534276 | Lithographic photomask alignment using non-planar alignment structures formed on wafer | Chih-Chao Yang, Hao Tang, Cornelius Brown Peethala | 2020-01-14 |