Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879107 | Method of forming barrier free contact for metal interconnects | Ashim Dutta, Ekmini Anuja De Silva, Jennifer Church | 2020-12-29 |
| 10615037 | Tone reversal during EUV pattern transfer using surface active layer assisted selective deposition | Ashim Dutta, Ekmini Anuja De Silva | 2020-04-07 |
| 10578981 | Post-lithography defect inspection using an e-beam inspection tool | Ekmini Anuja De Silva, Yasir Sulehria, Nelson Felix | 2020-03-03 |
| 10539884 | Post-lithography defect inspection using an e-beam inspection tool | Ashim Dutta, Ekmini Anuja De Silva | 2020-01-21 |