| 10832931 |
Electrostatic chuck with embossed top plate and cooling channels |
Chethan Mangalore, Arumuga Balan |
2020-11-10 |
| 10766117 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2020-09-08 |
| 10714321 |
Sputtering target with backside cooling grooves |
Brian T. West, Michael S. Cox |
2020-07-14 |
| 10702971 |
Textured membrane for a multi-chamber carrier head |
Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky |
2020-07-07 |
| 10610994 |
Polishing system with local area rate control and oscillation mode |
Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Edwin C. Suarez +2 more |
2020-04-07 |
| 10589399 |
Textured small pad for chemical mechanical polishing |
Edwin C. Suarez, Jason Garcheung Fung, Eric Lau, King Yi Heung, Ashwin CHOCKALINGAM +3 more |
2020-03-17 |
| 10562147 |
Polishing system with annular platen or polishing pad for substrate monitoring |
Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker |
2020-02-18 |
| 10532441 |
Three-zone carrier head and flexible membrane |
Jamie Stuart Leighton |
2020-01-14 |
