Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, Chih Chung Chou, Edwin C. Suarez, Garrett H. Sin +2 more | 2020-04-07 |
| 10589399 | Textured small pad for chemical mechanical polishing | Jeonghoon Oh, Edwin C. Suarez, Jason Garcheung Fung, Eric Lau, Ashwin CHOCKALINGAM +3 more | 2020-03-17 |