Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Edwin C. Suarez, Garrett H. Sin +2 more | 2020-04-07 |
CC
Chih Chung Chou
Overall (2020): #520,548 of 565,922Top 95%
1
Patents 2020