| 10796922 |
Systems and methods for internal surface conditioning assessment in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2020-10-06 |
| 10707061 |
Systems and methods for internal surface conditioning in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2020-07-07 |
| 10610994 |
Polishing system with local area rate control and oscillation mode |
Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Garrett H. Sin +2 more |
2020-04-07 |
| 10589399 |
Textured small pad for chemical mechanical polishing |
Jeonghoon Oh, Jason Garcheung Fung, Eric Lau, King Yi Heung, Ashwin CHOCKALINGAM +3 more |
2020-03-17 |
| 10593523 |
Systems and methods for internal surface conditioning in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2020-03-17 |
