Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Edwin C. Suarez +2 more | 2020-04-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Edwin C. Suarez +2 more | 2020-04-07 |