Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867776 | Physical vapor deposition in-chamber electro-magnet | Brian T. West, Miroslav Gelo, Dinkesh Somanna | 2020-12-15 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10757797 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Zheng Yuan, James L'HEUREUX | 2020-08-25 |
| 10714321 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2020-07-14 |
| 10580626 | Arcing detection apparatus for plasma processing | Lin Zhang, Rongping Wang, Jian J. Chen, Andrew V. LE | 2020-03-03 |