Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10757797 | Method and apparatus for gas abatement | Jibing Zeng, David Muquing HOU, Michael S. Cox, Zheng Yuan, James L'HEUREUX | 2020-08-25 |
| 10580626 | Arcing detection apparatus for plasma processing | Lin Zhang, Jian J. Chen, Michael S. Cox, Andrew V. LE | 2020-03-03 |