Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655223 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Jang Seok OH | 2020-05-19 |
| 10580626 | Arcing detection apparatus for plasma processing | Lin Zhang, Rongping Wang, Jian J. Chen, Michael S. Cox | 2020-03-03 |