Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655223 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Andrew V. LE | 2020-05-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655223 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Andrew V. LE | 2020-05-19 |