| 10875145 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2020-12-29 |
| 10821573 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2020-11-03 |
| 10800000 |
Multi-layered nano-fibrous CMP pads |
Robert D. Tolles, Mahendra C. ORILALL, Rajeev Bajaj |
2020-10-13 |
| 10786885 |
Thin plastic polishing article for CMP applications |
Robert D. Tolles, Gregory E. Menk, Eric Davey, You Wang, Huyen Karen Tran +3 more |
2020-09-29 |
| 10562147 |
Polishing system with annular platen or polishing pad for substrate monitoring |
Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga |
2020-02-18 |
| 10537974 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Nag B. Patibandla +4 more |
2020-01-21 |
