Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10766117 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2020-09-08 |
| 10702971 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Thomas Brezoczky | 2020-07-07 |
| 10562147 | Polishing system with annular platen or polishing pad for substrate monitoring | Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Fred C. Redeker | 2020-02-18 |