Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832931 | Electrostatic chuck with embossed top plate and cooling channels | Chethan Mangalore, Jeonghoon Oh | 2020-11-10 |
AB
Arumuga Balan
Overall (2020): #542,777 of 565,922Top 100%
1
Patents 2020