Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832931 | Electrostatic chuck with embossed top plate and cooling channels | Arumuga Balan, Jeonghoon Oh | 2020-11-10 |
CM
Chethan Mangalore
Overall (2020): #514,872 of 565,922Top 95%
1
Patents 2020