| 10480074 |
Apparatus for radical-based deposition of dielectric films |
Jianhua Zhou, Juan Carlos Rocha-Alvarez, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu |
2019-11-19 |
| 10468263 |
Tungsten deposition without barrier layer |
Yong Wu, Chia Cheng Chin, Srinivas Gandikota |
2019-11-05 |
| 10410865 |
Methods of forming self-aligned vias |
David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more |
2019-09-10 |
| 10354916 |
Methods for wordline separation in 3D-NAND devices |
Ziqing Duan, Abhijit Basu Mallick, Kelvin Chan |
2019-07-16 |
| 10319624 |
Oxidative volumetric expansion of metals and metal containing compounds |
Susmit Singha Roy, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna |
2019-06-11 |
| 10319604 |
Methods for self-aligned patterning |
Ziqing Duan, Abhijit Basu Mallick, Srinivas Gandikota |
2019-06-11 |
| 10276379 |
Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide |
Rui Cheng, Abhijit Basu Mallick |
2019-04-30 |
