Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490436 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Mayur Govind Kulkarni, Sanjeev Baluja, Praket P. Jha, Krishna Nittala | 2019-11-26 |
| 10480068 | Chamber liner for high temperature processing | Sanjeev Baluja, Ren-Guan Duan | 2019-11-19 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10312076 | Application of bottom purge to increase clean efficiency | Sanjeev Baluja, Mayur Govind Kulkarni | 2019-06-04 |
| 10232324 | Gas mixing apparatus | Kartik Shah, Scott McClelland | 2019-03-19 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Leon Volfovski, Michael R. Rice +1 more | 2019-02-26 |