Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Nyi O. Myo, Schubert S. Chu, Jeffrey Tobin, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10325763 | Physical vapor deposition processing systems target cooling | Wei Wang, Vishwas Kumar Pandey | 2019-06-18 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak, Nyi O. Myo +8 more | 2019-04-23 |
| 10232324 | Gas mixing apparatus | Kalyanjit Ghosh, Scott McClelland | 2019-03-19 |
| 10221483 | Showerhead design | Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak | 2019-03-05 |