Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2019-05-14 |
| 10221483 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar | 2019-03-05 |
| 10211046 | Substrate support ring for more uniform layer thickness | Heng Pan, Christopher S. Olsen | 2019-02-19 |