Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508339 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei +2 more | 2019-12-17 |
| 10221483 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Lara Hawrylchak | 2019-03-05 |