Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Nyi O. Myo, Schubert S. Chu, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10453733 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU | 2019-10-22 |
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10221483 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Umesh M. Kelkar, Lara Hawrylchak | 2019-03-05 |