Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453733 | Substrate transfer mechanisms | Masato Ishii, Shu-Kwan LAU, Jeffrey Tobin | 2019-10-22 |
| 10356848 | Lamp heating for process chamber | Schubert S. Chu | 2019-07-16 |
| 10170342 | Flow controlled liner having spatially distributed gas passages | Shu-Kwan LAU | 2019-01-01 |