Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490666 | Horizontal gate all around and FinFET device isolation | Shiyu Sun, Nam Sung Kim, Naomi Yoshida, Sung Won Jun, Vanessa Pena +4 more | 2019-11-26 |
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui, Philip A. Bottini +3 more | 2019-05-14 |