Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510545 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Johanes S. Swenberg, Wei Liu, Steven C. H. Hung | 2019-12-17 |
| 10504779 | Hydrogenation and nitridization processes for reducing oxygen content in a film | Johanes S. Swenberg, Wei Liu, Shashank Sharma, Shankar Muthukrishnan, Rene George | 2019-12-10 |
| 10431466 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Johanes S. Swenberg, Wei Liu, Steven C. H. Hung | 2019-10-01 |
| 10347492 | Modifying work function of a metal film with a plasma process | Steven C. H. Hung, Johanes S. Swenberg, Wei Liu | 2019-07-09 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Philip A. Bottini +3 more | 2019-05-14 |
| 10236207 | Hydrogenation and nitridization processes for reducing oxygen content in a film | Johanes S. Swenberg, Wei Liu, Shashank Sharma, Shankar Muthukrishnan, Rene George | 2019-03-19 |