Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Schubert S. Chu, Jeffrey Tobin, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10260164 | Methods and apparatus for deposition processes | Kevin Joseph Bautista, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2019-04-16 |