| 10366940 |
Air gap and air spacer pinch off |
Griselda Bonilla, Son V. Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini |
2019-07-30 |
| 10276436 |
Selective recessing to form a fully aligned via |
Benjamin D. Briggs, Jessica Dechene, Joe Lee, Theodorus E. Standaert |
2019-04-30 |
| 10256186 |
Interconnect structure having subtractive etch feature and damascene feature |
Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Naftali E. Lustig, Andrew H. Simon |
2019-04-09 |
| 10256171 |
Air gap and air spacer pinch off |
Griselda Bonilla, Son V. Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini |
2019-04-09 |
| 10242933 |
Air gap and air spacer pinch off |
Griselda Bonilla, Son V. Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini |
2019-03-26 |
| 10229851 |
Self-forming barrier for use in air gap formation |
Benjamin D. Briggs, Takeshi Nogami, Christopher J. Penny |
2019-03-12 |
| 10224236 |
Forming air gap |
Samuel S. Choi, Ronald G. Filippi, Naftali E. Lustig, Griselda Bonilla, Andrew H. Simon |
2019-03-05 |
| 10211153 |
Low aspect ratio interconnect |
Benjamin D. Briggs, Raghuveer R. Patlolla, Cornelius Brown Peethala, David L. Rath, Chih-Chao Yang |
2019-02-19 |
| 10211138 |
Metal silicate spacers for fully aligned vias |
Benjamin D. Briggs, Jessica Dechene, Joe Lee |
2019-02-19 |
| 10204856 |
Interconnect structures with fully aligned vias |
Daniel C. Edelstein, Nicholas C. M. Fuller, Satyanarayana V. Nitta, David L. Rath |
2019-02-12 |
| 10177076 |
Air gap and air spacer pinch off |
Griselda Bonilla, Son V. Nguyen, Takeshi Nogami, Christopher J. Penny, Deepika Priyadarshini |
2019-01-08 |
| 10170416 |
Selective blocking boundary placement for circuit locations requiring electromigration short-length |
Benjamin D. Briggs, Joe Lee, Christopher J. Penny |
2019-01-01 |
