Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453751 | Tone inversion method and structure for selective contact via patterning | Xiaofeng Qiu, Michael V. Aquilino, Patrick Carpenter, Ming Hao Tang, Haigou Huang +1 more | 2019-10-22 |
| 10325819 | Methods, apparatus and system for providing a pre-RMG replacement metal contact for a finFET device | Jinsheng Gao, Daniel Jaeger, Michael V. Aquilino, Patrick Carpenter, Huy Cao +2 more | 2019-06-18 |
| 10276436 | Selective recessing to form a fully aligned via | Benjamin D. Briggs, Elbert E. Huang, Joe Lee, Theodorus E. Standaert | 2019-04-30 |
| 10269654 | Methods, apparatus and system for replacement contact for a finFET device | Jinsheng Gao, Daniel Jaeger, Michael V. Aquilino, Patrick Carpenter, Huy Cao +2 more | 2019-04-23 |
| 10224239 | Multi-level air gap formation in dual-damascene structure | Richard A. Conti, Susan S. Fan, Son V. Nguyen, Jeffrey C. Shearer | 2019-03-05 |
| 10211138 | Metal silicate spacers for fully aligned vias | Benjamin D. Briggs, Elbert E. Huang, Joe Lee | 2019-02-19 |
| 10204797 | Methods, apparatus, and system for reducing step height difference in semiconductor devices | Jinsheng Gao, Daniel Jaeger, Michael V. Aquilino, Patrick Carpenter, Junsic Hong +1 more | 2019-02-12 |
| 10204827 | Multi-level air gap formation in dual-damascene structure | Richard A. Conti, Susan S. Fan, Son V. Nguyen, Jeffrey C. Shearer | 2019-02-12 |