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Methods, apparatus and system for stringer defect reduction in a trench cut region of a finFET device |
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Cap structure |
Jinsheng Gao, Chih-Chiang Chang, Michael V. Aquilino, Patrick Carpenter, Junsic Hong +3 more |
2019-10-29 |
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Methods, apparatus and system for stringer defect reduction in a trench cut region of a finFET device |
Hui Zang, Haigou Huang, Veeraraghavan S. Basker, Christopher Nassar, Jinsheng Gao +1 more |
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Composite contact etch stop layer |
Haigou Huang, Xusheng Wu, Jinsheng Gao |
2019-08-20 |
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Contacts formed with self-aligned cuts |
Ruilong Xie, Chanro Park, Laertis Economikos, Haiting Wang, Hui Zang |
2019-08-06 |
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Methods, apparatus and system for self-aligned metal hard masks |
Jinsheng Gao, Michael V. Aquilino, Patrick Carpenter, Jiehui Shu, Pei Liu +1 more |
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Methods, apparatus and system for providing a pre-RMG replacement metal contact for a finFET device |
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Methods, apparatus and system for replacement contact for a finFET device |
Jinsheng Gao, Michael V. Aquilino, Patrick Carpenter, Jessica Dechene, Huy Cao +2 more |
2019-04-23 |
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Methods of forming a resistor structure between adjacent transistor gates on an integrated circuit product and the resulting devices |
Hui Zang, Manfred Eller, Haiting Wang |
2019-04-02 |
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Methods, apparatus, and system for reducing step height difference in semiconductor devices |
Jinsheng Gao, Michael V. Aquilino, Patrick Carpenter, Junsic Hong, Jessica Dechene +1 more |
2019-02-12 |