Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115609 | Separation and regeneration apparatus and substrate processing apparatus | Kazuyuki Mitsuoka, Hiroki Ohno, Takayuki Toshima | 2018-10-30 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takayuki Toshima | 2018-08-14 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Keisuke Egashira, Yosuke Hachiya, Kotaro Ooishi +2 more | 2018-03-20 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Keiji Tanouchi, Kazuyuki Mitsuoka, Takayuki Toshima | 2018-01-30 |