Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hiroshi Tomita, Kazuyuki Mitsuoka, Gen You +3 more | 2018-10-09 |
| 10014186 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hiroshi Tomita, Yasuhito Yoshimizu, Hiroaki Yamada | 2018-07-03 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hiroshi Tomita | 2018-06-05 |
| 9991159 | Semiconductor device manufacture method | Fuyuma Ito, Yasuhito Yoshimizu, Yuya Akeboshi, Masayuki Kitamura | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hiroshi Tomita | 2018-01-02 |