Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115609 | Separation and regeneration apparatus and substrate processing apparatus | Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-10-30 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Gen You +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hisashi Kawano, Hiromi Kiyose, Mitsunori Nakamori | 2018-04-24 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Keiji Tanouchi, Takehiko Orii, Takayuki Toshima | 2018-01-30 |