Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121659 | Pattern forming method and heating apparatus | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2018-11-06 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Kazuyuki Mitsuoka, Takehiko Orii, Takayuki Toshima | 2018-01-30 |
| 9859118 | Pattern forming method and heating apparatus | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2018-01-02 |