Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |