Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083845 | Substrate processing apparatus, substrate processing method and storage medium | — | 2018-09-25 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |