Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121646 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Hisashi Kawano, Yuki Yoshida | 2018-11-06 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Satoru Tanaka | 2018-04-24 |
| 9870914 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Hisashi Kawano, Yuki Yoshida | 2018-01-16 |