Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121646 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Hisashi Kawano, Meitoku Aibara | 2018-11-06 |
| 10019301 | Information processing device, and control method and storage medium | — | 2018-07-10 |
| 9870914 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Hisashi Kawano, Meitoku Aibara | 2018-01-16 |