Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121646 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Meitoku Aibara, Yuki Yoshida | 2018-11-06 |
| 10062586 | Chemical fluid processing apparatus and chemical fluid processing method | Derek Bassett, Wallace P. Printz, Gentaro Goshi, Yoshihiro Kai | 2018-08-28 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hiromi Kiyose, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Keisuke Egashira, Yosuke Hachiya +2 more | 2018-03-20 |
| 9870914 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Meitoku Aibara, Yuki Yoshida | 2018-01-16 |