Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096480 | Method and apparatus for dynamic control of the temperature of a wet etch process | Antonio Luis Pacheco Rotondaro | 2018-10-09 |
| 10062586 | Chemical fluid processing apparatus and chemical fluid processing method | Derek Bassett, Gentaro Goshi, Hisashi Kawano, Yoshihiro Kai | 2018-08-28 |
| 10048587 | Method and apparatus for increased recirculation and filtration in a photoresist dispense system using a liquid empty reservoir | Michael A. Carcasi, Joshua Hooge | 2018-08-14 |