Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096528 | Critical dimension control by use of a photo agent | Anton J. deVilliers | 2018-10-09 |
| 10048587 | Method and apparatus for increased recirculation and filtration in a photoresist dispense system using a liquid empty reservoir | Wallace P. Printz, Joshua Hooge | 2018-08-14 |
| 10048594 | Photo-sensitized chemically amplified resist (PS-CAR) model calibration | Mark H. Somervell, Carlos A. Fonseca | 2018-08-14 |
| 10020195 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Benjamen M. Rathsack, Mark H. Somervell, Joshua Hooge | 2018-07-10 |
| 9978618 | Hot plate with programmable array of lift devices for multi-bake process optimization | Mark H. Somervell, Josh Hooge | 2018-05-22 |