Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048594 | Photo-sensitized chemically amplified resist (PS-CAR) model calibration | Michael A. Carcasi, Carlos A. Fonseca | 2018-08-14 |
| 10020195 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Michael A. Carcasi, Benjamen M. Rathsack, Joshua Hooge | 2018-07-10 |
| 9978618 | Hot plate with programmable array of lift devices for multi-bake process optimization | Josh Hooge, Michael A. Carcasi | 2018-05-22 |