Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048594 | Photo-sensitized chemically amplified resist (PS-CAR) model calibration | Michael A. Carcasi, Mark H. Somervell | 2018-08-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048594 | Photo-sensitized chemically amplified resist (PS-CAR) model calibration | Michael A. Carcasi, Mark H. Somervell | 2018-08-14 |