Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048587 | Method and apparatus for increased recirculation and filtration in a photoresist dispense system using a liquid empty reservoir | Michael A. Carcasi, Wallace P. Printz | 2018-08-14 |
| 10020195 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Michael A. Carcasi, Benjamen M. Rathsack, Mark H. Somervell | 2018-07-10 |