Issued Patents 2018
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157747 | Location-specific tuning of stress to control bow to control overlay in semiconductor processing | — | 2018-12-18 |
| 10151981 | Methods of forming structures supported by semiconductor substrates | — | 2018-12-11 |
| 10147655 | System and method for temperature control in plasma processing system | — | 2018-12-04 |
| 10115726 | Method and system for forming memory fin patterns | Hoyoung Kang | 2018-10-30 |
| 10103032 | Methods of forming etch masks for sub-resolution substrate patterning | — | 2018-10-16 |
| 10096528 | Critical dimension control by use of a photo agent | Michael A. Carcasi | 2018-10-09 |
| 10083842 | Methods of sub-resolution substrate patterning | Nihar Mohanty, Jeffrey Smith | 2018-09-25 |
| 10061199 | Methods of forming a mask for substrate patterning | — | 2018-08-28 |
| 10035113 | Method and system for a spiral mixer | Ronald Nasman | 2018-07-31 |
| 10032719 | Semiconductor device structures | Adam L. Olson, Kaveri Jain, Lijing Gou, William R. Brown, Ho Seop Eom +1 more | 2018-07-24 |
| 10020196 | Methods of forming etch masks for sub-resolution substrate patterning | — | 2018-07-10 |
| 9997598 | Three-dimensional semiconductor device and method of fabrication | Jeffrey Smith, Nihar Mohanty, Subhadeep Kal, Kandabara Tapily | 2018-06-12 |
| 9987655 | Inline dispense capacitor system | Ronald Nasman, James Grootegoed, Norman A. Jacobson, Jr. | 2018-06-05 |
| 9989846 | Method for patterning incorporating misalignment error protection | Jeffrey Smith | 2018-06-05 |
| 9977339 | System and method for shifting critical dimensions of patterned films | Daniel Fulford | 2018-05-22 |
| 9921478 | Negative tone developer compatible photoresist composition and methods of use | — | 2018-03-20 |