Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141183 | Methods of spin-on deposition of metal oxides | Lior Huli, Jeffrey Smith, Richard A. Farrell | 2018-11-27 |
| 10083842 | Methods of sub-resolution substrate patterning | Anton J. deVilliers, Jeffrey Smith | 2018-09-25 |
| 10049892 | Method for processing photoresist materials and structures | Eric Chih-Fang Liu, Elliott Franke | 2018-08-14 |
| 9997598 | Three-dimensional semiconductor device and method of fabrication | Jeffrey Smith, Anton J. deVilliers, Subhadeep Kal, Kandabara Tapily | 2018-06-12 |
| 9991133 | Method for etch-based planarization of a substrate | Cheryl Pereira, Lior Huli | 2018-06-05 |