Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062586 | Chemical fluid processing apparatus and chemical fluid processing method | Derek Bassett, Wallace P. Printz, Hisashi Kawano, Yoshihiro Kai | 2018-08-28 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9865483 | Substrate liquid processing method, substrate liquid processing apparatus, and recording medium | Hiroyuki Higashi, Takahisa Otsuka | 2018-01-09 |